Conformal Growth of Nanometer-Thick Transition Metal Dichalcogenide TiS(x)-NbS(x) Heterostructures over 3D Substrates by Atomic Layer Deposition: Implications for Device Fabrication

[Image: see text] The scalable and conformal synthesis of two-dimensional (2D) transition metal dichalcogenide (TMDC) heterostructures is a persisting challenge for their implementation in next-generation devices. In this work, we report the synthesis of nanometer-thick 2D TMDC heterostructures cons...

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Detalles Bibliográficos
Autores principales: Basuvalingam, Saravana Balaji, Bloodgood, Matthew A., Verheijen, Marcel A., Kessels, Wilhelmus M. M., Bol, Ageeth A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2021
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7885689/
https://www.ncbi.nlm.nih.gov/pubmed/33615158
http://dx.doi.org/10.1021/acsanm.0c02820

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7885689/
https://www.ncbi.nlm.nih.gov/pubmed/33615158
http://dx.doi.org/10.1021/acsanm.0c02820

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