Optical and surface energy probe of Hamaker constant in copper oxide thin films for NEMS and MEMS stiction control applications

Copper oxide films hold substantial promise as anti-stiction coatings in micro-electromechanical (MEMS) devices and with shrinking dimensions on the nanometre scale on nano electromechanical (NEMS) devices. The Hamaker constant will play a very significant role in understanding stiction and tribolog...

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Detalles Bibliográficos
Autores principales: Ogwu, Abraham, Darma, T. H.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7895955/
https://www.ncbi.nlm.nih.gov/pubmed/33608614
http://dx.doi.org/10.1038/s41598-021-83653-8

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7895955/
https://www.ncbi.nlm.nih.gov/pubmed/33608614
http://dx.doi.org/10.1038/s41598-021-83653-8

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