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Optical and surface energy probe of Hamaker constant in copper oxide thin films for NEMS and MEMS stiction control applications
Copper oxide films hold substantial promise as anti-stiction coatings in micro-electromechanical (MEMS) devices and with shrinking dimensions on the nanometre scale on nano electromechanical (NEMS) devices. The Hamaker constant will play a very significant role in understanding stiction and tribolog...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group UK
2021
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7895955/ https://www.ncbi.nlm.nih.gov/pubmed/33608614 http://dx.doi.org/10.1038/s41598-021-83653-8 |