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The Influence of the Different Repair Methods on the Electrical Properties of the Normally off p-GaN HEMT
The influence of the repair process on the electrical properties of the normally off p-GaN high-electron-mobility transistor (HEMT) is studied in detail in this paper. We find that the etching process will cause the two-dimensional electron gas (2DEG) and the mobility of the p-GaN HEMT to decrease....
Autores principales: | , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7911281/ https://www.ncbi.nlm.nih.gov/pubmed/33530451 http://dx.doi.org/10.3390/mi12020131 |