Structural and Mechanical Properties of a-BCN Films Prepared by an Arc-Sputtering Hybrid Process

Amorphous boron carbon nitride (a-BCN) films exhibit excellent properties such as high hardness and high wear resistance. However, the correlation between the film structure and its mechanical properties is not fully understood. In this study, a-BCN films were prepared by an arc-sputtering hybrid pr...

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Detalles Bibliográficos
Autores principales: Hirata, Yuki, Takeuchi, Ryotaro, Taniguchi, Hiroyuki, Kawagoe, Masao, Iwamoto, Yoshinao, Yoshizato, Mikito, Akasaka, Hiroki, Ohtake, Naoto
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7913669/
https://www.ncbi.nlm.nih.gov/pubmed/33546509
http://dx.doi.org/10.3390/ma14040719

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7913669/
https://www.ncbi.nlm.nih.gov/pubmed/33546509
http://dx.doi.org/10.3390/ma14040719

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