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Structural and Mechanical Properties of a-BCN Films Prepared by an Arc-Sputtering Hybrid Process
Amorphous boron carbon nitride (a-BCN) films exhibit excellent properties such as high hardness and high wear resistance. However, the correlation between the film structure and its mechanical properties is not fully understood. In this study, a-BCN films were prepared by an arc-sputtering hybrid pr...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7913669/ https://www.ncbi.nlm.nih.gov/pubmed/33546509 http://dx.doi.org/10.3390/ma14040719 |