Optical Monitoring of the Production Quality of Si-Nanoribbon Chips Intended for the Detection of ASD-Associated Oligonucleotides

Gas-phase etching and optical lithography were employed for the fabrication of a silicon nanoribbon chip (Si-NR chip). The quality of the so-fabricated silicon nanoribbons (Si-NRs) was monitored by optical Raman scattering spectroscopy. It was demonstrated that the structures of the Si-NRs were virt...

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Detalles Bibliográficos
Autores principales: Malsagova, Kristina A., Pleshakova, Tatyana O., Popov, Vladimir P., Kupriyanov, Igor N., Galiullin, Rafael A., Kozlov, Andrey F., Shumov, Ivan D., Kaysheva, Anna L., Tikhonenko, Fedor V., Archakov, Alexander I., Ivanov, Yuri D.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7913754/
https://www.ncbi.nlm.nih.gov/pubmed/33546438
http://dx.doi.org/10.3390/mi12020147

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7913754/
https://www.ncbi.nlm.nih.gov/pubmed/33546438
http://dx.doi.org/10.3390/mi12020147

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