Performance Analysis of Surface Reconstruction Algorithms in Vertical Scanning Interferometry Based on Coherence Envelope Detection

Optical interferometry plays an important role in the topographical surface measurement and characterization in precision/ultra-precision manufacturing. An appropriate surface reconstruction algorithm is essential in obtaining accurate topography information from the digitized interferograms. Howeve...

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Detalles Bibliográficos
Autores principales: Wu, Dongxu, Liang, Fusheng, Kang, Chengwei, Fang, Fengzhou
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7915951/
https://www.ncbi.nlm.nih.gov/pubmed/33567494
http://dx.doi.org/10.3390/mi12020164

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7915951/
https://www.ncbi.nlm.nih.gov/pubmed/33567494
http://dx.doi.org/10.3390/mi12020164

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