Preparation and Properties of Crystalline IGZO Thin Films

IGZO thin films can be used as active layers of thin-film transistors and have been widely studied. However, amorphous indium gallium zinc oxide (IGZO) fabricated at room temperature is vulnerable in subsequent manufacturing processes, such as etching and sputtering; this limits IGZO thin film trans...

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Detalles Bibliográficos
Autores principales: Wang, Xiao, Shen, Zhihua, Li, Jie, Wu, Shengli
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7918925/
https://www.ncbi.nlm.nih.gov/pubmed/33672860
http://dx.doi.org/10.3390/membranes11020134

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7918925/
https://www.ncbi.nlm.nih.gov/pubmed/33672860
http://dx.doi.org/10.3390/membranes11020134

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