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Preparation and Properties of Crystalline IGZO Thin Films

IGZO thin films can be used as active layers of thin-film transistors and have been widely studied. However, amorphous indium gallium zinc oxide (IGZO) fabricated at room temperature is vulnerable in subsequent manufacturing processes, such as etching and sputtering; this limits IGZO thin film trans...

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Detalles Bibliográficos
Autores principales:	Wang, Xiao, Shen, Zhihua, Li, Jie, Wu, Shengli
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7918925/ https://www.ncbi.nlm.nih.gov/pubmed/33672860 http://dx.doi.org/10.3390/membranes11020134

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