Effect of Soft X-ray Irradiation on Film Properties of a Hydrogenated Si-Containing DLC Film

The effect of soft X-ray irradiation on hydrogenated silicon-containing diamond-like carbon (Si-DLC) films intended for outer space applications was investigated by using synchrotron radiation (SR). We found that the reduction in film thickness was about 60 nm after 1600 mA·h SR exposure, whereas th...

Descripción completa

Detalles Bibliográficos
Autores principales: Kanda, Kazuhiro, Imai, Ryo, Tanaka, Shotaro, Suzuki, Shuto, Niibe, Masahito, Hasegawa, Takayuki, Suzuki, Tsuneo, Akasaka, Hiroki
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7919647/
https://www.ncbi.nlm.nih.gov/pubmed/33672069
http://dx.doi.org/10.3390/ma14040924

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7919647/
https://www.ncbi.nlm.nih.gov/pubmed/33672069
http://dx.doi.org/10.3390/ma14040924

Ejemplares similares