Effect of methyl terminal and ethylene bridging groups on porous organosilicate glass films: FTIR, ellipsometric porosimetry, luminescence dataset

A dataset in this report is regarding an article, “A detailed ellipsometric porosimetry and positron annihilation spectroscopy study of porous organosilicate glass films with various ratios of methyl terminal and ethylene bridging groups” [1]. The data of porous organosilicate glass (OSG) low-k film...

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Detalles Bibliográficos
Autores principales: Rasadujjaman, Md, Zhang, Jinming, Mogilnikov, Konstantin P., Vishnevskiy, Alexey S., Zhang, Jing, Baklanov, Mikhail R.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Elsevier 2021
Materias:
Data Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7921473/
https://www.ncbi.nlm.nih.gov/pubmed/33718549
http://dx.doi.org/10.1016/j.dib.2021.106895

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7921473/
https://www.ncbi.nlm.nih.gov/pubmed/33718549
http://dx.doi.org/10.1016/j.dib.2021.106895

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