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Analytic Optimization of Cantilevers for Photoacoustic Gas Sensor with Capacitive Transduction
We propose a new concept of photoacoustic gas sensing based on capacitive transduction which allows full integration while conserving the required characteristics of the sensor. For the sensor’s performance optimization, trial and error method is not feasible due to economic and time constrains. The...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7926384/ https://www.ncbi.nlm.nih.gov/pubmed/33669992 http://dx.doi.org/10.3390/s21041489 |