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Analytic Optimization of Cantilevers for Photoacoustic Gas Sensor with Capacitive Transduction

We propose a new concept of photoacoustic gas sensing based on capacitive transduction which allows full integration while conserving the required characteristics of the sensor. For the sensor’s performance optimization, trial and error method is not feasible due to economic and time constrains. The...

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Detalles Bibliográficos
Autores principales:	Trzpil, Wioletta, Maurin, Nicolas, Rousseau, Roman, Ayache, Diba, Vicet, Aurore, Bahriz, Michael
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7926384/ https://www.ncbi.nlm.nih.gov/pubmed/33669992 http://dx.doi.org/10.3390/s21041489

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