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Noise as Diagnostic Tool for Quality and Reliability of MEMS
This perspective explores future research approaches on the use of noise characteristics of microelectromechanical systems (MEMS) devices as a diagnostic tool to assess their quality and reliability. Such a technique has been applied to electronic devices. In comparison to these, however, MEMS have...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2021
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7926468/ https://www.ncbi.nlm.nih.gov/pubmed/33671582 http://dx.doi.org/10.3390/s21041510 |