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Noise as Diagnostic Tool for Quality and Reliability of MEMS

This perspective explores future research approaches on the use of noise characteristics of microelectromechanical systems (MEMS) devices as a diagnostic tool to assess their quality and reliability. Such a technique has been applied to electronic devices. In comparison to these, however, MEMS have...

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Detalles Bibliográficos
Autores principales: Mohd-Yasin, Faisal, Nagel, David J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7926468/
https://www.ncbi.nlm.nih.gov/pubmed/33671582
http://dx.doi.org/10.3390/s21041510

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