Study on the Stability of the Electrical Connection of High-Temperature Pressure Sensor Based on the Piezoresistive Effect of P-Type SiC

In this study, a preparation method for the high-temperature pressure sensor based on the piezoresistive effect of p-type SiC is presented. The varistor with a positive trapezoidal shape was designed and etched innovatively to improve the contact stability between the metal and SiC varistor. Additio...

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Detalles Bibliográficos
Autores principales: Li, Yongwei, Liang, Ting, Lei, Cheng, Li, Qiang, Li, Zhiqiang, Ghaffar, Abdul, Xiong, Jijun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7926769/
https://www.ncbi.nlm.nih.gov/pubmed/33670001
http://dx.doi.org/10.3390/mi12020216

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7926769/
https://www.ncbi.nlm.nih.gov/pubmed/33670001
http://dx.doi.org/10.3390/mi12020216

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