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Scanning transmission helium ion microscopy on carbon nanomembranes

A dark-field scanning transmission ion microscopy detector was designed for the helium ion microscope. The detection principle is based on a secondary electron conversion holder with an exchangeable aperture strip allowing its acceptance angle to be tuned from 3 to 98 mrad. The contrast mechanism an...

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Detalles Bibliográficos
Autores principales: Emmrich, Daniel, Wolff, Annalena, Meyerbröker, Nikolaus, Lindner, Jörg K N, Beyer, André, Gölzhäuser, Armin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7934706/
https://www.ncbi.nlm.nih.gov/pubmed/33728240
http://dx.doi.org/10.3762/bjnano.12.18