An Integrated Evanescent Field Sensor for the Simultaneous Measurement of Layer Refractive Index and Thickness

A novel integrated sensor for the simultaneous measurement of layer refractive index and thickness based on evanescent fields is proposed. The theoretical limits for the accuracy of the sensor were examined for the example of a [Formula: see text] layer. The influence of production tolerance on the...

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Detalles Bibliográficos
Autores principales: Jäger, Matthias, Bruns, Jürgen, Schneidewind, Jessica, Pinnow, Cay, Gargouri, Hassan, Petermann, Klaus
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7956392/
https://www.ncbi.nlm.nih.gov/pubmed/33652576
http://dx.doi.org/10.3390/s21051628

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7956392/
https://www.ncbi.nlm.nih.gov/pubmed/33652576
http://dx.doi.org/10.3390/s21051628

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