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An Integrated Evanescent Field Sensor for the Simultaneous Measurement of Layer Refractive Index and Thickness
A novel integrated sensor for the simultaneous measurement of layer refractive index and thickness based on evanescent fields is proposed. The theoretical limits for the accuracy of the sensor were examined for the example of a [Formula: see text] layer. The influence of production tolerance on the...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7956392/ https://www.ncbi.nlm.nih.gov/pubmed/33652576 http://dx.doi.org/10.3390/s21051628 |