Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements

High-speed tactile roughness measurements set high demand on the trackability of the stylus probe. Because of the features of low mass, low probing force, and high signal linearity, the piezoresistive silicon microprobe is a hopeful candidate for high-speed roughness measurements. This paper investi...

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Detalles Bibliográficos
Autores principales: Xu, Min, Li, Zhi, Fahrbach, Michael, Peiner, Erwin, Brand, Uwe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7956422/
https://www.ncbi.nlm.nih.gov/pubmed/33668104
http://dx.doi.org/10.3390/s21051557

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7956422/
https://www.ncbi.nlm.nih.gov/pubmed/33668104
http://dx.doi.org/10.3390/s21051557

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