High Power Impulse Magnetron Sputtering of In(2)O(3)/Sn Cold Sprayed Composite Target

High Power Impulse Magnetron Sputtering (HiPIMS) was used for deposition of indium tin oxide (ITO) transparent thin films at low substrate temperature. A hybrid-type composite target was self-prepared by low-pressure cold spraying process. Prior to spraying In(2)O(3) and oxidized Sn powders were mix...

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Detalles Bibliográficos
Autores principales: Winnicki, Marcin, Wiatrowski, Artur, Mazur, Michał
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7961378/
https://www.ncbi.nlm.nih.gov/pubmed/33807798
http://dx.doi.org/10.3390/ma14051228

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7961378/
https://www.ncbi.nlm.nih.gov/pubmed/33807798
http://dx.doi.org/10.3390/ma14051228

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