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High Power Impulse Magnetron Sputtering of In(2)O(3)/Sn Cold Sprayed Composite Target
High Power Impulse Magnetron Sputtering (HiPIMS) was used for deposition of indium tin oxide (ITO) transparent thin films at low substrate temperature. A hybrid-type composite target was self-prepared by low-pressure cold spraying process. Prior to spraying In(2)O(3) and oxidized Sn powders were mix...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7961378/ https://www.ncbi.nlm.nih.gov/pubmed/33807798 http://dx.doi.org/10.3390/ma14051228 |