Development of a Compound Speckle Interferometer for Precision Three-Degree-of-Freedom Displacement Measurement

In this study, a compound speckle interferometer for measuring three-degree-of-freedom (3-DOF) displacement is proposed. The system, which combines heterodyne interferometry, speckle interferometry and beam splitting techniques, can perform precision 3-DOF displacement measurements, while still havi...

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Detalles Bibliográficos
Autores principales: Hsieh, Hung-Lin, Sun, Bo-Yen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7961601/
https://www.ncbi.nlm.nih.gov/pubmed/33807928
http://dx.doi.org/10.3390/s21051828

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7961601/
https://www.ncbi.nlm.nih.gov/pubmed/33807928
http://dx.doi.org/10.3390/s21051828

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