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Development of a Compound Speckle Interferometer for Precision Three-Degree-of-Freedom Displacement Measurement
In this study, a compound speckle interferometer for measuring three-degree-of-freedom (3-DOF) displacement is proposed. The system, which combines heterodyne interferometry, speckle interferometry and beam splitting techniques, can perform precision 3-DOF displacement measurements, while still havi...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2021
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7961601/ https://www.ncbi.nlm.nih.gov/pubmed/33807928 http://dx.doi.org/10.3390/s21051828 |