Nucleation and growth dynamics of graphene grown by radio frequency plasma-enhanced chemical vapor deposition

We investigated the nucleation and grain growth of graphene grown on Cu through radio frequency plasma-enhanced chemical vapor deposition (RF-PECVD) at different temperatures. A reasonable shielding method for the placement of copper was employed to achieve graphene by RF-PECVD. The nucleation and g...

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Detalles Bibliográficos
Autores principales: Li, Na, Zhen, Zhen, Zhang, Rujing, Xu, Zhenhua, Zheng, Zhen, He, Limin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7966375/
https://www.ncbi.nlm.nih.gov/pubmed/33727653
http://dx.doi.org/10.1038/s41598-021-85537-3

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7966375/
https://www.ncbi.nlm.nih.gov/pubmed/33727653
http://dx.doi.org/10.1038/s41598-021-85537-3

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