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Nucleation and growth dynamics of graphene grown by radio frequency plasma-enhanced chemical vapor deposition

We investigated the nucleation and grain growth of graphene grown on Cu through radio frequency plasma-enhanced chemical vapor deposition (RF-PECVD) at different temperatures. A reasonable shielding method for the placement of copper was employed to achieve graphene by RF-PECVD. The nucleation and g...

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Detalles Bibliográficos
Autores principales:	Li, Na, Zhen, Zhen, Zhang, Rujing, Xu, Zhenhua, Zheng, Zhen, He, Limin
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7966375/ https://www.ncbi.nlm.nih.gov/pubmed/33727653 http://dx.doi.org/10.1038/s41598-021-85537-3

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