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Optimizing the plasma oxidation of aluminum gate electrodes for ultrathin gate oxides in organic transistors
A critical requirement for the application of organic thin-film transistors (TFTs) in mobile or wearable applications is low-voltage operation, which can be achieved by employing ultrathin, high-capacitance gate dielectrics. One option is a hybrid dielectric composed of a thin film of aluminum oxide...
Autores principales: | Geiger, Michael, Hagel, Marion, Reindl, Thomas, Weis, Jürgen, Weitz, R. Thomas, Solodenko, Helena, Schmitz, Guido, Zschieschang, Ute, Klauk, Hagen, Acharya, Rachana |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7973517/ https://www.ncbi.nlm.nih.gov/pubmed/33737629 http://dx.doi.org/10.1038/s41598-021-85517-7 |
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