Rational Development of Guanidinate and Amidinate Based Cerium and Ytterbium Complexes as Atomic Layer Deposition Precursors: Synthesis, Modeling, and Application

Owing to the limited availability of suitable precursors for vapor phase deposition of rare‐earth containing thin‐film materials, new or improved precursors are sought after. In this study, we explored new precursors for atomic layer deposition (ALD) of cerium (Ce) and ytterbium (Yb) containing thin...

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Detalles Bibliográficos
Autores principales: Kaur, Parmish, Mai, Lukas, Muriqi, Arbresha, Zanders, David, Ghiyasi, Ramin, Safdar, Muhammad, Boysen, Nils, Winter, Manuela, Nolan, Michael, Karppinen, Maarit, Devi, Anjana
Formato: Online Artículo Texto
Lenguaje:English
Publicado: John Wiley and Sons Inc. 2021
Materias:
Full Papers
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7986905/
https://www.ncbi.nlm.nih.gov/pubmed/33470473
http://dx.doi.org/10.1002/chem.202003907

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7986905/
https://www.ncbi.nlm.nih.gov/pubmed/33470473
http://dx.doi.org/10.1002/chem.202003907

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