Design and Application of MEMS-Based Hall Sensor Array for Magnetic Field Mapping

A magnetic field measurement system based on an array of Hall sensors is proposed. The sensors are fabricated using conventional microelectromechanical systems (MEMS) techniques and consist of a P-type silicon substrate, a silicon dioxide isolation layer, a phosphide-doped cross-shaped detection zon...

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Detalles Bibliográficos
Autores principales: Lee, Chia-Yen, Lin, Yu-Ying, Kuo, Chung-Kang, Fu, Lung-Ming
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7998490/
https://www.ncbi.nlm.nih.gov/pubmed/33809131
http://dx.doi.org/10.3390/mi12030299

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7998490/
https://www.ncbi.nlm.nih.gov/pubmed/33809131
http://dx.doi.org/10.3390/mi12030299

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