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Design and Application of MEMS-Based Hall Sensor Array for Magnetic Field Mapping

A magnetic field measurement system based on an array of Hall sensors is proposed. The sensors are fabricated using conventional microelectromechanical systems (MEMS) techniques and consist of a P-type silicon substrate, a silicon dioxide isolation layer, a phosphide-doped cross-shaped detection zon...

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Detalles Bibliográficos
Autores principales:	Lee, Chia-Yen, Lin, Yu-Ying, Kuo, Chung-Kang, Fu, Lung-Ming
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7998490/ https://www.ncbi.nlm.nih.gov/pubmed/33809131 http://dx.doi.org/10.3390/mi12030299

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