Selective Deposition of Hard Boron-Carbon Microstructures on Silicon

Boron-rich B-C compounds with high hardness have been recently synthesized by the chemical vapor deposition (CVD) method. In this paper, we present our successful efforts in the selective growth of microstructures of boron-carbon compounds on silicon substrates. This was achieved by combining microf...

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Detalles Bibliográficos
Autores principales: Samudrala, Gopi, Chakrabarty, Kallol, Baker, Paul A., Tucker, Bernabe S., Vohra, Yogesh K., Catledge, Shane A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7998847/
https://www.ncbi.nlm.nih.gov/pubmed/33805705
http://dx.doi.org/10.3390/ma14061397

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7998847/
https://www.ncbi.nlm.nih.gov/pubmed/33805705
http://dx.doi.org/10.3390/ma14061397

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