Design and Modification of a High-Resolution Optical Interferometer Accelerometer

The Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer that combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume, and anti-electromagnetism disturbance measurement of acceleration, which...

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Detalles Bibliográficos
Autores principales: Yao, Yuan, Pan, Debin, Wang, Jianbo, Dong, Tingting, Guo, Jie, Wang, Chensheng, Geng, Anbing, Fang, Weidong, Lu, Qianbo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7999461/
https://www.ncbi.nlm.nih.gov/pubmed/33809438
http://dx.doi.org/10.3390/s21062070

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7999461/
https://www.ncbi.nlm.nih.gov/pubmed/33809438
http://dx.doi.org/10.3390/s21062070

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