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Investigation of Potting-Adhesive-Induced Thermal Stress in MEMS Pressure Sensor
Thermal stress is one of the main sources of micro-electro-mechanical systems (MEMS) devices error. The Wheatstone bridge is the sensing structure of a typical piezoresistive MEMS pressure sensor. In this study, the thermal stress induced by potting adhesive in MEMS pressure sensor was investigated...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8001441/ https://www.ncbi.nlm.nih.gov/pubmed/33809139 http://dx.doi.org/10.3390/s21062011 |
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author | Zhang, Yunfan Li, Bowen Li, Hui Shen, Shengnan Li, Feng Ni, Wentao Cao, Wan |
author_facet | Zhang, Yunfan Li, Bowen Li, Hui Shen, Shengnan Li, Feng Ni, Wentao Cao, Wan |
author_sort | Zhang, Yunfan |
collection | PubMed |
description | Thermal stress is one of the main sources of micro-electro-mechanical systems (MEMS) devices error. The Wheatstone bridge is the sensing structure of a typical piezoresistive MEMS pressure sensor. In this study, the thermal stress induced by potting adhesive in MEMS pressure sensor was investigated by experiments, calculated by analytics and analyzed by simulations. An experiment system was used to test the sensor at different air pressures and temperatures. The error becomes greater with the decrease in pressure. A set of novel formulas were proposed to calculate the stress–strain on Wheatstone bridge. The error increases with the temperature deviating from 25 °C. A full-scale geometric model was developed, and finite element simulations were performed, to analyze the effect of the stress on MEMS pressure sensor induced by different temperatures and thicknesses of potting adhesive. Simulation results agree well with the experiments, which indicated that there is a 3.48% to 6.50% output error in 0.35 mm potting adhesive at 150 °C. With the thickness of potting adhesive increasing, the variations of output error of the Wheatstone bridge present an N-shaped curve. The output error meets a maximum of 5.30% in the potting adhesive of 0.95 mm and can be reduced to 2.47%, by increasing the potting adhesive to 2.40 mm. |
format | Online Article Text |
id | pubmed-8001441 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2021 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-80014412021-03-28 Investigation of Potting-Adhesive-Induced Thermal Stress in MEMS Pressure Sensor Zhang, Yunfan Li, Bowen Li, Hui Shen, Shengnan Li, Feng Ni, Wentao Cao, Wan Sensors (Basel) Communication Thermal stress is one of the main sources of micro-electro-mechanical systems (MEMS) devices error. The Wheatstone bridge is the sensing structure of a typical piezoresistive MEMS pressure sensor. In this study, the thermal stress induced by potting adhesive in MEMS pressure sensor was investigated by experiments, calculated by analytics and analyzed by simulations. An experiment system was used to test the sensor at different air pressures and temperatures. The error becomes greater with the decrease in pressure. A set of novel formulas were proposed to calculate the stress–strain on Wheatstone bridge. The error increases with the temperature deviating from 25 °C. A full-scale geometric model was developed, and finite element simulations were performed, to analyze the effect of the stress on MEMS pressure sensor induced by different temperatures and thicknesses of potting adhesive. Simulation results agree well with the experiments, which indicated that there is a 3.48% to 6.50% output error in 0.35 mm potting adhesive at 150 °C. With the thickness of potting adhesive increasing, the variations of output error of the Wheatstone bridge present an N-shaped curve. The output error meets a maximum of 5.30% in the potting adhesive of 0.95 mm and can be reduced to 2.47%, by increasing the potting adhesive to 2.40 mm. MDPI 2021-03-12 /pmc/articles/PMC8001441/ /pubmed/33809139 http://dx.doi.org/10.3390/s21062011 Text en © 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Communication Zhang, Yunfan Li, Bowen Li, Hui Shen, Shengnan Li, Feng Ni, Wentao Cao, Wan Investigation of Potting-Adhesive-Induced Thermal Stress in MEMS Pressure Sensor |
title | Investigation of Potting-Adhesive-Induced Thermal Stress in MEMS Pressure Sensor |
title_full | Investigation of Potting-Adhesive-Induced Thermal Stress in MEMS Pressure Sensor |
title_fullStr | Investigation of Potting-Adhesive-Induced Thermal Stress in MEMS Pressure Sensor |
title_full_unstemmed | Investigation of Potting-Adhesive-Induced Thermal Stress in MEMS Pressure Sensor |
title_short | Investigation of Potting-Adhesive-Induced Thermal Stress in MEMS Pressure Sensor |
title_sort | investigation of potting-adhesive-induced thermal stress in mems pressure sensor |
topic | Communication |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8001441/ https://www.ncbi.nlm.nih.gov/pubmed/33809139 http://dx.doi.org/10.3390/s21062011 |
work_keys_str_mv | AT zhangyunfan investigationofpottingadhesiveinducedthermalstressinmemspressuresensor AT libowen investigationofpottingadhesiveinducedthermalstressinmemspressuresensor AT lihui investigationofpottingadhesiveinducedthermalstressinmemspressuresensor AT shenshengnan investigationofpottingadhesiveinducedthermalstressinmemspressuresensor AT lifeng investigationofpottingadhesiveinducedthermalstressinmemspressuresensor AT niwentao investigationofpottingadhesiveinducedthermalstressinmemspressuresensor AT caowan investigationofpottingadhesiveinducedthermalstressinmemspressuresensor |