Multi-Function Microelectromechanical Systems Implementation with an ASIC Compatible CMOS 0.18 μm Process

A multi-function microelectromechanical system (MEMS) with a three-axis magnetometer (MAG) and three-axis accelerometer (ACC) function was implemented with an application-specific integrated circuit (ASIC)-compatible complementary metal-oxide-semiconductor (CMOS) 0.18 μm process. The readout circuit...

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Detalles Bibliográficos
Autores principales: Lin, Chih-Hsuan, Song, Chao-Hung, Wen, Kuei-Ann
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8002977/
https://www.ncbi.nlm.nih.gov/pubmed/33803035
http://dx.doi.org/10.3390/mi12030314

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8002977/
https://www.ncbi.nlm.nih.gov/pubmed/33803035
http://dx.doi.org/10.3390/mi12030314

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