Spectral Ranking of Causal Influence in Complex Systems

Similar to natural complex systems, such as the Earth’s climate or a living cell, semiconductor lithography systems are characterized by nonlinear dynamics across more than a dozen orders of magnitude in space and time. Thousands of sensors measure relevant process variables at appropriate sampling...

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Detalles Bibliográficos
Autores principales: Zalmijn, Errol, Heskes, Tom, Claassen, Tom
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8003657/
https://www.ncbi.nlm.nih.gov/pubmed/33804599
http://dx.doi.org/10.3390/e23030369

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8003657/
https://www.ncbi.nlm.nih.gov/pubmed/33804599
http://dx.doi.org/10.3390/e23030369

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