Time-of-flight secondary ion mass spectrometry fragment regularity in gallium-doped zinc oxide thin films

Time-of-flight secondary ion mass spectrometry fragment analysis remains a challenging task. The fragment appearance regularity (FAR) rule is particularly useful for two-element compounds such as ZnO. Ion fragments appearing in the form of Zn(x)O(y) obey the rule [Formula: see text] in the positive...

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Detalles Bibliográficos
Autores principales: Saw, K. G., Esa, S. R.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8027856/
https://www.ncbi.nlm.nih.gov/pubmed/33828210
http://dx.doi.org/10.1038/s41598-021-87386-6

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8027856/
https://www.ncbi.nlm.nih.gov/pubmed/33828210
http://dx.doi.org/10.1038/s41598-021-87386-6

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