Cargando…

Dry Etching Performance and Gas-Phase Parameters of C(6)F(12)O + Ar Plasma in Comparison with CF(4) + Ar

This research work deals with the comparative study of C(6)F(12)O + Ar and CF(4) + Ar gas chemistries in respect to Si and SiO(2) reactive-ion etching processes in a low power regime. Despite uncertain applicability of C(6)F(12)O as the fluorine-containing etchant gas, it is interesting because of t...

Descripción completa

Detalles Bibliográficos
Autores principales:	Lim, Nomin, Choi, Yeon Sik, Efremov, Alexander, Kwon, Kwang-Ho
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8037253/ https://www.ncbi.nlm.nih.gov/pubmed/33805202 http://dx.doi.org/10.3390/ma14071595

Ejemplares similares

Plasma Parameters and Etching Characteristics of SiO(x)N(y) Films in CF(4) + O(2) + X (X = C(4)F(8) or CF(2)Br(2)) Gas Mixtures
por: Nam, Yunho, et al.
Publicado: (2020)

Study of Cryogenic Unmasked Etching of “Black Silicon” with Ar Gas Additives
por: Vyacheslavova, Ekaterina A., et al.
Publicado: (2022)

Secondary scintillation in Ar-CF$_4$ mixtures
por: Beschi, Andrea
Publicado: (2015)

On Relationships between Plasma Chemistry and Surface Reaction Kinetics Providing the Etching of Silicon in CF(4), CHF(3), and C(4)F(8) Gases Mixed with Oxygen
por: Baek, Seung Yong, et al.
Publicado: (2023)

$^{43}$Ar and $^{44}$Ar
por: Hudis, J, et al.
Publicado: (1970)

$^{43}Ar$ and $^{44}Ar$
por: Hudis, J, et al.
Publicado: (1970)

To Be(Ar) Or Not to Be(Ar) – Jones Dilemma?
por: Andrews, Nicholas A., et al.
Publicado: (2022)

Experimental ion mobility measurements for the LCTPC collaboration—Ar-CF$_4$ mixtures
por: Santos, M A G, et al.
Publicado: (2018)

Co-expression and clinical utility of AR-FL and AR splice variants AR-V3, AR-V7 and AR-V9 in prostate cancer
por: Wüstmann, Neele, et al.
Publicado: (2023)

Investigation of SiO(2) Etch Characteristics by C(6)F(6)/Ar/O(2) Plasmas Generated Using Inductively Coupled Plasma and Capacitively Coupled Plasma
por: Sung, Dain, et al.
Publicado: (2022)

Synthesis of a Polyaniline Nanoparticle Using a Solution Plasma Process with an Ar Gas Bubble Channel
por: Shin, Jun-Goo, et al.
Publicado: (2019)

On atmospheric $^{39}Ar$ and $^{42}Ar$ abundance
por: Cennini, P, et al.
Publicado: (1995)

Enhancement of Ar Ion Flux on the Substrate by Heterogeneous Charge Transfer Collision of Ar Atom with He Ion in an Inductively Coupled Ar/He Plasma
por: Seong, Inho, et al.
Publicado: (2023)

Database Development of SiO(2) Etching with Fluorocarbon Plasmas Diluted with Various Noble Gases of Ar, Kr, and Xe
por: Lee, Youngseok, et al.
Publicado: (2022)

Development of Virtual Metrology Using Plasma Information Variables to Predict Si Etch Profile Processed by SF(6)/O(2)/Ar Capacitively Coupled Plasma
por: Kwon, Ji-Won, et al.
Publicado: (2021)

Sequential estimation of the parameters in unstable AR(2)
por: Galtchouk, L, et al.
Publicado: (2004)

Ár njöt'i ar hai = El color de la tierra
Publicado: (2014)

The mass of $^{32}Ar$ and $^{33}Ar$ for fundamental tests
por: Blaum, K, et al.
Publicado: (2003)

Masses of 32Ar and 33Ar for fundamental tests
por: Blaum, K, et al.
Publicado: (2003)

AR Splicing Variants and Resistance to AR Targeting Agents
por: Kanayama, Mayuko, et al.
Publicado: (2021)

12th Encuentro de Strings@ar
Publicado: (2007)

Determination of $^{44}Ar$(n,$\gamma$)$^{45}$Ar, and $^{46}$Ar(n,$\gamma$)$^{47}$Ar reaction rates by (d,p) transfer reactions
por: Sorlin, O, et al.
Publicado: (2002)

ARS Leptogenesis
por: Drewes, M., et al.
Publicado: (2017)

Ars melancholiae
por: Weiss, Silvius Leopold, 1686-1750
Publicado: (1994)

Ars Obstetrica
por: Armytage, V. B. Green
Publicado: (1930)

Ars Gynæcologica
por: Green-Armytage, V. B.
Publicado: (1930)

Ars Obstetrica
por: Umachigi, V. S.
Publicado: (1930)

Ars Longa
Publicado: (1893)

The celecoxib derivatives AR-12 and AR-14 induce autophagy and clear prion-infected cells from prions
por: Abdulrahman, Basant A., et al.
Publicado: (2017)

Boutique neutrons advance (40)Ar/(39)Ar geochronology
por: Rutte, Daniel, et al.
Publicado: (2019)

Silicon Oxide Etching Process of NF(3) and F(3)NO Plasmas with a Residual Gas Analyzer
por: Kim, Woo-Jae, et al.
Publicado: (2021)

Identification of AR-V7 downstream genes commonly targeted by AR/AR-V7 and specifically targeted by AR-V7 in castration resistant prostate cancer
por: Sugiura, Masahiro, et al.
Publicado: (2020)

Mass Spectra Fitting as Diagnostic Tool for Magnetron Plasmas Generated in Ar and Ar/H(2) Gases with Tungsten Targets
por: Craciun, Cristina, et al.
Publicado: (2023)

Diverse roles of androgen receptor (AR) domains in AR-mediated signaling
por: Claessens, Frank, et al.
Publicado: (2008)

Therapeutic targeting of the androgen receptor (AR) and AR variants in prostate cancer
por: Narayanan, Ramesh
Publicado: (2020)

GABARAPL1 Promotes AR+ Prostate Cancer Growth by Increasing FL-AR/AR-V Transcription Activity and Nuclear Translocation
por: Su, Bing, et al.
Publicado: (2019)

Ars medica mexicana
por: Pérez-Tamayo, Ruy

The decay of $^{31}$Ar
por: García-Borge, M J, et al.
Publicado: (1990)

Pelagonius, Ars Veterinaria
por: Nutton, Vivian
Publicado: (1982)

Decay of $^{46}$Ar
por: Huck, A, et al.
Publicado: (1978)

Cannot write session to /tmp/vufind_sessions/sess_0ukft4gmbpgm47riv8msnhas9c