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The Early Steps of Molecule-to-Material Conversion in Chemical Vapor Deposition (CVD): A Case Study
Transition metal complexes with β-diketonate and diamine ligands are valuable precursors for chemical vapor deposition (CVD) of metal oxide nanomaterials, but the metal-ligand bond dissociation mechanism on the growth surface is not yet clarified in detail. We address this question by density functi...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8037710/ https://www.ncbi.nlm.nih.gov/pubmed/33916041 http://dx.doi.org/10.3390/molecules26071988 |