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An Auto-Focus Method of Microscope for the Surface Structure of Transparent Materials under Transmission Illumination

This paper is concerned with auto-focus of microscopes for the surface structure of transparent materials under transmission illumination, where two distinct focus states appear in the focusing process and the focus position is located between the two states with the local minimum of sharpness. Plea...

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Detalles Bibliográficos
Autores principales: Liao, Yang, Xiong, Yonghua, Yang, Yunhong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8038353/
https://www.ncbi.nlm.nih.gov/pubmed/33918521
http://dx.doi.org/10.3390/s21072487