A Compensation Method for Nonlinear Vibration of Silicon-Micro Resonant Sensor

A compensation method for nonlinear vibration of a silicon micro resonant sensor is proposed and evaluated to be effective through simulation and experimental analysis. Firstly, the parameter characterization model of the silicon micro resonant sensor is established, which presents significant nonli...

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Detalles Bibliográficos
Autores principales: Li, Yan, Li, Hao, Xiao, Yifeng, Cao, Le, Guo, Zhan-She
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8038624/
https://www.ncbi.nlm.nih.gov/pubmed/33916484
http://dx.doi.org/10.3390/s21072545

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8038624/
https://www.ncbi.nlm.nih.gov/pubmed/33916484
http://dx.doi.org/10.3390/s21072545

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