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Stoichiometry Dependence of Physical and Electrochemical Properties of the SnO(x) Film Anodes Deposited by Pulse DC Magnetron Sputtering
A batch of Sn oxides was fabricated by pulse direct current reactive magnetron sputtering (pDC−RMS) using different Ar/O(2) flow ratios at 0.3 Pa; the influence of stoichiometry on the physical and electrochemical properties of the films was evaluated by the characterization of scanning electron mic...
Autores principales: | , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8038721/ https://www.ncbi.nlm.nih.gov/pubmed/33917375 http://dx.doi.org/10.3390/ma14071803 |