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Stoichiometry Dependence of Physical and Electrochemical Properties of the SnO(x) Film Anodes Deposited by Pulse DC Magnetron Sputtering

A batch of Sn oxides was fabricated by pulse direct current reactive magnetron sputtering (pDC−RMS) using different Ar/O(2) flow ratios at 0.3 Pa; the influence of stoichiometry on the physical and electrochemical properties of the films was evaluated by the characterization of scanning electron mic...

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Detalles Bibliográficos
Autores principales:	Ma, Yibo, Zhang, Xiaofeng, Liu, Weiming, Wei, Youxiu, Fu, Ziyi, Li, Jiuyong, Zhang, Xuan, Peng, Jingjing, Yan, Yue
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8038721/ https://www.ncbi.nlm.nih.gov/pubmed/33917375 http://dx.doi.org/10.3390/ma14071803

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