Synthesis and Thermal Study of Hexacoordinated Aluminum(III) Triazenides for Use in Atomic Layer Deposition

[Image: see text] Amidinate and guanidinate ligands have been used extensively to produce volatile and thermally stable precursors for atomic layer deposition. The triazenide ligand is relatively unexplored as an alternative ligand system. Herein, we present six new Al(III) complexes bearing three s...

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Detalles Bibliográficos
Autores principales: Samii, Rouzbeh, Zanders, David, Buttera, Sydney C., Kessler, Vadim, Ojamäe, Lars, Pedersen, Henrik, O’Brien, Nathan J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2021
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8041287/
https://www.ncbi.nlm.nih.gov/pubmed/33710869
http://dx.doi.org/10.1021/acs.inorgchem.0c03496

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8041287/
https://www.ncbi.nlm.nih.gov/pubmed/33710869
http://dx.doi.org/10.1021/acs.inorgchem.0c03496

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