High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits

Low-loss photonic integrated circuits and microresonators have enabled a wide range of applications, such as narrow-linewidth lasers and chip-scale frequency combs. To translate these into a widespread technology, attaining ultralow optical losses with established foundry manufacturing is critical....

Descripción completa

Detalles Bibliográficos
Autores principales: Liu, Junqiu, Huang, Guanhao, Wang, Rui Ning, He, Jijun, Raja, Arslan S., Liu, Tianyi, Engelsen, Nils J., Kippenberg, Tobias J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8052462/
https://www.ncbi.nlm.nih.gov/pubmed/33863901
http://dx.doi.org/10.1038/s41467-021-21973-z

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8052462/
https://www.ncbi.nlm.nih.gov/pubmed/33863901
http://dx.doi.org/10.1038/s41467-021-21973-z

Ejemplares similares