Formation and Evaluation of Silicon Substrate with Highly-Doped Porous Si Layers Formed by Metal-Assisted Chemical Etching

Porous silicon (Si) is a low thermal conductivity material, which has high potential for thermoelectric devices. However, low output performance of porous Si hinders the development of thermoelectric performance due to low electrical conductivity. The large contact resistance from nonlinear contact...

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Detalles Bibliográficos
Autores principales: Li, Yijie, Van Toan, Nguyen, Wang, Zhuqing, Samat, Khairul Fadzli Bin, Ono, Takahito
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2021
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8058134/
https://www.ncbi.nlm.nih.gov/pubmed/33877472
http://dx.doi.org/10.1186/s11671-021-03524-z

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8058134/
https://www.ncbi.nlm.nih.gov/pubmed/33877472
http://dx.doi.org/10.1186/s11671-021-03524-z

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