Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning

Microelectromechanical System (MEMS)-based scanning mirrors are important optical devices that have been employed in many fields as a low-cost and miniaturized solution. In recent years, the rapid development of Light Detection and Ranging (LiDAR) has led to opportunities and challenges for MEMS sca...

Descripción completa

Detalles Bibliográficos
Autores principales: Wang, Qiang, Wang, Weimin, Zhuang, Xuye, Zhou, Chongxi, Fan, Bin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8066418/
https://www.ncbi.nlm.nih.gov/pubmed/33915772
http://dx.doi.org/10.3390/mi12040378

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8066418/
https://www.ncbi.nlm.nih.gov/pubmed/33915772
http://dx.doi.org/10.3390/mi12040378

Ejemplares similares