A Resonant Pressure Microsensor with a Wide Pressure Measurement Range

This paper presents a resonant pressure microsensor with a wide range of pressure measurements. The developed microsensor is mainly composed of a silicon-on-insulator (SOI) wafer to form pressure-sensing elements, and a silicon-on-glass (SOG) cap to form vacuum encapsulation. To realize a wide range...

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Detalles Bibliográficos
Autores principales: Xiang, Chao, Lu, Yulan, Cheng, Chao, Wang, Junbo, Chen, Deyong, Chen, Jian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8066463/
https://www.ncbi.nlm.nih.gov/pubmed/33916030
http://dx.doi.org/10.3390/mi12040382

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8066463/
https://www.ncbi.nlm.nih.gov/pubmed/33916030
http://dx.doi.org/10.3390/mi12040382

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