Analytical Study of Porous Organosilicate Glass Films Prepared from Mixtures of 1,3,5- and 1,3-Alkoxysilylbenzenes

Organosilicate glass (OSG)-based porous low dielectric constant (low-k) films with different molar ratios of 1,3,5-tris(triethoxysilyl)benzene to 1,3-bis(triethoxysilyl)benzene bridging organic groups (1:3 and 1:7) were spin-on deposited, followed by a soft bake in air and N(2) at 150 °C and hard ba...

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Detalles Bibliográficos
Autores principales: Rasadujjaman, Md, Wang, Xuesong, Wang, Yanrong, Zhang, Jing, Arkhincheev, Valeriy E., Baklanov, Mikhail R.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8069764/
https://www.ncbi.nlm.nih.gov/pubmed/33918926
http://dx.doi.org/10.3390/ma14081881

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8069764/
https://www.ncbi.nlm.nih.gov/pubmed/33918926
http://dx.doi.org/10.3390/ma14081881

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