Design, Simulation, Fabrication, and Characterization of an Electrothermal Tip-Tilt-Piston Large Angle Micromirror for High Fill Factor Segmented Optical Arrays

Micro-electromechanical system (MEMS) micromirrors have been in development for many years, but the ability to steer beams to angles larger than 20° remains a challenging endeavor. This paper details a MEMS micromirror device capable of achieving large motion for both tip/tilt angles and piston moti...

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Detalles Bibliográficos
Autores principales: Torres, David, Starman, LaVern, Hall, Harris, Pastrana, Juan, Dooley, Sarah
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8069987/
https://www.ncbi.nlm.nih.gov/pubmed/33921288
http://dx.doi.org/10.3390/mi12040419

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8069987/
https://www.ncbi.nlm.nih.gov/pubmed/33921288
http://dx.doi.org/10.3390/mi12040419

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